Product overview

The Mechatronic mBWR200 represents the next generation of advanced Batch Wafer Reader systems, specifically engineered for high-efficiency wafer tracking and handling. This compact tabletop tool enables fully automated notch-alignment and ID reading of 200mm (8") wafers directly within a 25-slot cassette.

Powered by the high-end IOSS WID120 reader, the mBWR200 provides a "single-button" process that eliminates the need to remove wafers from the cassette, significantly reducing the risk of contamination or damage. Whether used as a standalone tool or integrated into existing production lines via SECS/GEM, it is the ideal solution for modern semiconductor manufacturing environments.

Key Features

Lightning-Fast Cycle Times: Completes a full process (alignment and ID reading) of 25 wafers in approximately 35 seconds.

Dual Reading Capability: Supports both front-side and back-side code recognition without manual intervention.

Integrated Precision: Equipped with the industry-leading IOSS WID120 Wafer ID Reader for superior decoding accuracy.

Intelligent Mapping: Features a mapping sensor to detect wafer presence, cross-slots, or double-slots before processing.

Advanced Alignment: Provides automatic notch-alignment of all wafers inside the cassette for uniform positioning.

User-Friendly Interface: Operated via an intuitive 10.1" touchscreen with a SEMI standard Graphical User Interface (GUI).

Cleanroom Certified: Designed for high-purity environments, certified to ISO Class 3 (formerly FS209E Class 1).